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High Stability and High Performance PEALD IZO/IGZO Top Gate Thin Film Transistor via Nano Scale Thickness Control
- 제목
- High Stability and High Performance PEALD IZO/IGZO Top Gate Thin Film Transistor via Nano Scale Thickness Control
- 저자
- 박진성
- 발행일
- 2022-06-28
- 학회명
- ALD 2022