Adhesion of nonconductive film onto SiO2 substrates after oxygen plasma treatment

  • 김영호
제목
Adhesion of nonconductive film onto SiO2 substrates after oxygen plasma treatment
저자
김영호
발행일
2016-10-25
학회명
The 15th International Symposium on Microelectronics and Packaging
개최지
COEX, Seoul, Korea