Local Behavior of Deposition Velocity onto a Flat Plate in Horizontal Airflow under the Influence of Thermophoresis

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초록

In this study, the Gaussian Diffusion Sphere Model (GDSM) and the Statistical Lagrangian Particle Tracking (SLPT) approach were employed and adjusted to calculate the local deposition velocity onto a flat plate in horizontal airflow. The GDSM and the SLPT approach were validated by comparing the predicted local deposition velocities with those determined by solving the equation of convective diffusion. Both the GDSM and the SLPT approach were found to be accurate in calculating the local deposition velocity onto a flat plate in horizontal airflow. In addition, the GDSM was much more efficient than the SLPT approach in terms of the calculation time. Finally, a parametric study on the local deposition velocity onto a flat plate exposed to horizontal airflow was performed using the GDSM with the consideration of the effects of the gravity, convection, diffusion, and thermophoresis.

키워드

PARTICLE DEPOSITIONSEMICONDUCTOR WAFERSPARALLEL-FLOWEUVL MASKSCLEAN ROOMSURFACEELECTROPHORESISDIFFUSIONFIELD
제목
Local Behavior of Deposition Velocity onto a Flat Plate in Horizontal Airflow under the Influence of Thermophoresis
저자
Woo, Sang-HeeLee, Kwan-SooYook, Se-Jin
DOI
10.1080/02786826.2015.1085952
발행일
2015-10
유형
Article
저널명
Aerosol Science and Technology
49
10
페이지
920 ~ 927