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Dependency of Nanotopography Impact on Surfactant Concentration in Ceria Slurry for STI Chemical Mechanical Polishing
- 제목
- Dependency of Nanotopography Impact on Surfactant Concentration in Ceria Slurry for STI Chemical Mechanical Polishing
- 저자
- 백운규
- 발행일
- 2003-04-25
- 학회명
- 제79회 정기총회