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Achieving Ultra-High Mobility and Reliability of ALD-IGZO TFTs via Selective N2O Plasma Reactant for BEOL Applications
- 제목
- Achieving Ultra-High Mobility and Reliability of ALD-IGZO TFTs via Selective N2O Plasma Reactant for BEOL Applications
- 저자
- 박진성
- 발행일
- 2023-07-26
- 학회명
- ALD 2023
- 개최지
- BELLEVUE, WASHINGTON, USA