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The effect of source gas on the etching characteristics of Er doped optical waveguide films using inductively coupled plasma etching
- 제목
- The effect of source gas on the etching characteristics of Er doped optical waveguide films using inductively coupled plasma etching
- 저자
- 신동욱
- 발행일
- 2004-06-23
- 학회명
- 2004 international Nano Ceramics/Crystals Forum and international Symposium on intermaterials
- 개최지
- 한양 대학교