Enhancement of Carrier Mobility and Concentration through Hydrogen Plasma Doping: Low-Temperature PEALD Deposition of High Performance TCO Films

제목
Enhancement of Carrier Mobility and Concentration through Hydrogen Plasma Doping: Low-Temperature PEALD Deposition of High Performance TCO Films
저자
박진성
발행일
2025-08-20
학회명
IMID2025
개최지
부산 벡스코