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Enhancement of Carrier Mobility and Concentration through Hydrogen Plasma Doping: Low-Temperature PEALD Deposition of High Performance TCO Films
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- Enhancement of Carrier Mobility and Concentration through Hydrogen Plasma Doping: Low-Temperature PEALD Deposition of High Performance TCO Films
- 저자
- 박진성
- 발행일
- 2025-08-20
- 학회명
- IMID2025
- 개최지
- 부산 벡스코