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Proximity Gettering Design via Nano-Cavities Induced by Hydrogen-ion Implantation for Si CMOS Image Sensor

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Proximity Gettering Design via Nano-Cavities Induced by Hydrogen-ion Implantation for Si CMOS Image Sensor
저자
박재근
발행일
2015-10-13
학회명
228th ECS Meeting
개최지
Hyatt Regency Phoenix & Phoenix Convention Center

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