Adhesion of sputter-deposited Cu/Ti film on plasma-treated polymer substrate

초록

The effect of Ar plasma pretreatment on the adhesion of the sputter-deposited Cu/Ti film, which was used as a seed layer for subsequent electrodeposition of thick Cu film, on an Ajinomoto build-up film (ABF) was evaluated as a function of the plasma power. The Ar plasma pretreatment of the ABF (above 1.2 kW) surface resulted in three-fold increase of the peel-off strength (0.70 kN/m) compared to the untreated sample (0.23 kN/m). The Ar plasma treatment produced a nanoscale worm-like surface roughness on the ABF surface which was responsible for the improved adhesion of the Cu/Ti film. Examination of the fractured surfaces revealed that when the substrate was plasma-treated above 1.2 kW, the fracture occurred in the substrate rather than by delamination of the Cu/Ti film. In fact, the fracture of the ABF substrate, which consists of the SiO₂ filler embedded in a polymer resin matrix, proceeded mainly by decohesion of the SiO₂ microspheres from the polymer matrix. Hence, to further improve the adhesion of the Cu/Ti film, it is advisable to consider strengthening the interface between the SiO₂ filler and the resin matrix through surface modification of the SiO₂ microspheres.

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