Fabrication of sub-10 nm Polymer-Template Metallic Nanotube using Chemical-Mechanical Polishing and Atomic Layer Deposition

제목
Fabrication of sub-10 nm Polymer-Template Metallic Nanotube using Chemical-Mechanical Polishing and Atomic Layer Deposition
저자
이승백
발행일
2012-08-17
학회명
Nano Korea Symposium 2012
개최지
COEX, Korea