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- 제목
- A Study on the Electrokinetic Behavior of Nano-size Ceria Particulate for Damascene Gate Chemical Mechanical Planarization in ULSI Process
- 저자
- 박재근
- 발행일
- 2004-04-17
- 학회명
- 2004 spring meeting of Korean Ceramic Society
- 개최지
- Korea University, Seoul, Korea