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Plasma-Enhanced Atomic Layer Deposition of Aluminum-Indium Oxide Thin Films and Associated Device Applications
- 제목
- Plasma-Enhanced Atomic Layer Deposition of Aluminum-Indium Oxide Thin Films and Associated Device Applications
- 저자
- 박진성
- 발행일
- 2022-05-19
- 학회명
- 2022 한국재료학회 춘계학술대회