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Elucidating the Molecular Structure of Amorphous H:SiON Films through Gas Permeation Behavior

제목
Elucidating the Molecular Structure of Amorphous H:SiON Films through Gas Permeation Behavior
저자
박호범
발행일
2021-05-12
학회명
2021 한국공업화학회 춘계 총회 및 학술대회

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