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Research and development of microwave plasma enhanced chemical vapor deposition system for fabricating field emission cathodes
- 제목
- Research and development of microwave plasma enhanced chemical vapor deposition system for fabricating field emission cathodes
- 저자
- Ming-Chieh Lin
- 발행일
- 2019-07-24
- 학회명
- The 32th International Vacuum Nanoelectronics Conference (IVNC 2019)
- 개최지
- Cincinatti, United States