ScholarWorks@한양대학교

상세 보기

Analysis of the slurry role in nanotopography impact for STI chemical mechanical polishing

제목
Analysis of the slurry role in nanotopography impact for STI chemical mechanical polishing
저자
백운규
발행일
2003-04-25
학회명
제79회 정기총회

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.