Improved crystal quality of a-plane GaN on r-plane sapphire with multiple buffer layers by metal-organic chemical vapor deposition

제목
Improved crystal quality of a-plane GaN on r-plane sapphire with multiple buffer layers by metal-organic chemical vapor deposition
저자
박진섭
발행일
2011-05-23
학회명
5th Asia-Pacific Workshop on Widegap Semiconductors (APWS2011)
개최지
Mie, Japan