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Oxidant Effect on Characteristics of Thin HfO2 Film Grown by Atomic Layer Deposition
- 제목
- Oxidant Effect on Characteristics of Thin HfO2 Film Grown by Atomic Layer Deposition
- 저자
- 안진호
- 발행일
- 2005-10-16
- 학회명
- 2005 The Electrochemical Society 208th ECS meeting
- 개최지
- Los Angeles , USA