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Atomic Layer Deposition of Molybdenum Carbonitride Films Using New Liquid Mo Precursor

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Atomic Layer Deposition of Molybdenum Carbonitride Films Using New Liquid Mo Precursor
저자
전형탁
발행일
2022-11-16
학회명
22nd International Conference on Atomic Layer Deposition
개최지
파라다이스 호텔 부산

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