Ferroelectric Field-Effect Transistor Synaptic Device With Hafnium-Silicate Interlayer

  • Kim, Sang Woo; 
  • Shin, Wonjun; 
  • Kim, Munhyeon; 
  • Kwon, Ki Ryun; 
  • Yim, Jiyong; 
  • ... Kwon, Daewoong; 
  • 외 7명
Citations

WEB OF SCIENCE

17
Citations

SCOPUS

17

초록

A ferroelectric field-effect-transistor (FeFET) with hafnium zirconium oxide ferroelectric layer and hafnium silicate (HfSiOx) interlayer (IL) is demonstrated. Compared to a FeFET with SiO2 IL, the proposed FeFET is confirmed to have faster program/erase operations, wider memory window, and the improved endurance/retention characteristics due to the higher dielectric constant of HfSiOx and superior interfacial state between HfxZr((1-x))O-2 and IL. The proposed FeFET demonstrates a power spectral density that is approximately two times smaller than that of conventional FeFETs and endurance exceeding 1010 cycles. This underscores its enhanced suitability for neuromorphic computing applications.

키워드

FeFETs; Iron; Threshold voltage; Hafnium compounds; Zirconium; Capacitance; Ferroelectric FET; HZO; high-kappa interlayer; synaptic devices; LOW-FREQUENCY NOISE
제목
Ferroelectric Field-Effect Transistor Synaptic Device With Hafnium-Silicate Interlayer
저자
Kim, Sang Woo; Shin, Wonjun; Kim, Munhyeon; Kwon, Ki Ryun; Yim, Jiyong; Kim, Jeonghan; Han, Changhyeon; Jeong, Soi; Park, Eun Chan; You, Ji Won; Kim, Hyunwoo; Choi, Rino; Kwon, Daewoong
DOI
10.1109/LED.2023.3324695
발행일
2023-12
유형
Article
저널명
IEEE Electron Device Letters
권
44
호
12
페이지
1955 ~ 1958