Effects of Post Annealing on the Properties of AL2O3/HfO/ZnO Thin Film Transistor Deposition by Atomic Layer Deposition

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제목
Effects of Post Annealing on the Properties of AL2O3/HfO/ZnO Thin Film Transistor Deposition by Atomic Layer Deposition
저자
전형탁
발행일
2009-11-05
학회명
GJ-NST 2009, International Conference on Nano Science and Nano Technology
개최지
Mokpo National University, KOREA