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- 제목
- Effects of Post Annealing on the Properties of AL2O3/HfO/ZnO Thin Film Transistor Deposition by Atomic Layer Deposition
- 저자
- 전형탁
- 발행일
- 2009-11-05
- 학회명
- GJ-NST 2009, International Conference on Nano Science and Nano Technology
- 개최지
- Mokpo National University, KOREA