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- 제목
- Effective multi-step Ge condensation process using intermittent SiO2 strip to obtain a high-Ge concentration and a thick Ge-on-insulator (GeOI) substrate for p-MOSFET
- 저자
- 박재근
- 발행일
- 2014-10-31
- 학회명
- 1st symposium for International Advanced Functional Materials & Devices
- 개최지
- SUMCO Kyushu Factory (Imari)