Improved Material Properties of a-GaN on r-Sapphire with High Temperature GaN Multiple Buffer Layers by Metal-organic Chemical Vapor Deposition

제목
Improved Material Properties of a-GaN on r-Sapphire with High Temperature GaN Multiple Buffer Layers by Metal-organic Chemical Vapor Deposition
저자
박진섭
발행일
2011-07-12
학회명
9th International Conference on Nitride Semiconductors
개최지
Glasgow, UK