ScholarWorks@한양대학교

상세 보기

Investigation and characterization of p-type Si implanted by Fe and Co ions

  • 김은규
제목
Investigation and characterization of p-type Si implanted by Fe and Co ions
저자
김은규
발행일
2011-07-07
학회명
15th Inter. Symp. on Phys. of Semicond. and Appl.
개최지
Jeju

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.