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Characteristics of Atomic-layer-Depositied Hafnium Oxide Gate Dielectrics

제목
Characteristics of Atomic-layer-Depositied Hafnium Oxide Gate Dielectrics
저자
안진호
발행일
2002-02-22
학회명
제 9회 반도체 학술대회
개최지
천안 상록리조트 컨벤션센터

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