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Effective Oxidation Method to Fabricate Relaxed SiGe-on-Insulator (SGOI) Substrate with High Ge Concentration by Ge Condensation

  • 박재근
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Effective Oxidation Method to Fabricate Relaxed SiGe-on-Insulator (SGOI) Substrate with High Ge Concentration by Ge Condensation
저자
박재근
발행일
2011-10-20
학회명
2011 한국물리학회 가을학술논문발표회
개최지
부산 BEXCO

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