Characterization of nonvolatile SiC nanocrystal memory with SiO2/Si3N4/SiO2 and Si3N4/SiO2/Si3N4 tunnel layers

  • 김은규
제목
Characterization of nonvolatile SiC nanocrystal memory with SiO2/Si3N4/SiO2 and Si3N4/SiO2/Si3N4 tunnel layers
저자
김은규
발행일
2009-12-10
학회명
6th Inter. Conf. on Advanced Materials and Devices
개최지
Jeju, Korea