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Measurement of Negative Ions using Cylindrical Probe and Planar Probe in Ar/SF6 Plasmas

  • 정규선
제목
Measurement of Negative Ions using Cylindrical Probe and Planar Probe in Ar/SF6 Plasmas
저자
정규선
발행일
2013-01-28
학회명
5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
개최지
일본

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