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High-Removal Poly Si-to-Oxide Selectivity in poly Si CMP for NAND Flash Memory Beyond 65nm
- 제목
- High-Removal Poly Si-to-Oxide Selectivity in poly Si CMP for NAND Flash Memory Beyond 65nm
- 저자
- 백운규
- 발행일
- 2008-10-15
- 학회명
- 2008 PRIME PACIFIC RIM MEETING ON ELECTROCHEMICAL AND SOLID-STATE SCIENCE
- 개최지
- Hawaii convention center