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The Influence of Suspending Environment on the Dispersion Stability of Slurry and its Effect on Cu CMP Process
- 제목
- The Influence of Suspending Environment on the Dispersion Stability of Slurry and its Effect on Cu CMP Process
- 저자
- 백운규
- 발행일
- 2003-04-29
- 학회명
- 105th Annual Meeting & Exposition
- 개최지
- Nashville(USA)