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Characteristics of Tin Sulfide Grown Thin films using Tetrakis(dimethylamino)Tin and Hydrogen Sulfur by Atomic Layer Deposition

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Characteristics of Tin Sulfide Grown Thin films using Tetrakis(dimethylamino)Tin and Hydrogen Sulfur by Atomic Layer Deposition
저자
전형탁
발행일
2013-11-07
학회명
2013 한국재료학회 추계학술발표대회
개최지
제주도 롯데호텔

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