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Nano-structure fabrication without etching process using PDMS transcription method

제목
Nano-structure fabrication without etching process using PDMS transcription method
저자
안진호
발행일
2005-11-11
학회명
한국마이크로전자 및 패키징학회 2005 추계 기술심포지움
개최지
한양대학교

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