Multi-step ART1 algorithm for recognition of defect patterns on semiconductor wafers

Choi, Gyunghyun; Kim, Sung-Hee; Ha, Chunghun; Bae, Suk Joo

doi:10.1080/00207543.2011.574502

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Multi-step ART1 algorithm for recognition of defect patterns on semiconductor wafers

Choi, Gyunghyun;
Kim, Sung-Hee;
Ha, Chunghun;
Bae, Suk Joo

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WEB OF SCIENCE

34

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SCOPUS

38

초록

Gyunghyun Choi's work was supported by the research fund of Hanyang University (HY-2000). Chunghun Ha's work was partly supported by the Korea Research Foundation Grant funded by the Korean Government (MOEHRD, Basic Research Promotion Fund) (KRF-2007-331-D00545). Suk Joo Bae's work (2011-0016598) was supported by Mid-career Researcher Program through NRF grant funded by the MEST.

키워드

spatial defects; neural network; pattern recognition; similarity; wafer map; yield management; NEURAL-NETWORK APPROACH; SPATIAL-PATTERN; BIN MAP; YIELD; CLASSIFICATION; FABRICATION

제목: Multi-step ART1 algorithm for recognition of defect patterns on semiconductor wafers

저자: Choi, Gyunghyun; Kim, Sung-Hee; Ha, Chunghun; Bae, Suk Joo

DOI: 10.1080/00207543.2011.574502

발행일: 2012-06

유형: Article

저널명: International Journal of Production Research

권: 50

호: 12

페이지: 3274 ~ 3287