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Atomic Layer Deposition of Indium Gallium Zinc Oxide (IGZO) Semiconductor Thin Films: From Precursor to Thin Film Transistor Application
- 제목
- Atomic Layer Deposition of Indium Gallium Zinc Oxide (IGZO) Semiconductor Thin Films: From Precursor to Thin Film Transistor Application
- 저자
- 박진성
- 발행일
- 2019-07-23
- 학회명
- 19th International Conference on Atomic Layer Deposition
- 개최지
- Nellevue, Washington, USA