Speed enhancement of WSi2 nanocrystals memory with barrier engineered Si3N4/HfAlO tunnel layer

  • 김은규
제목
Speed enhancement of WSi2 nanocrystals memory with barrier engineered Si3N4/HfAlO tunnel layer
저자
김은규
발행일
2011-10-26
학회명
24th Inter. Microprocesses and Nanotechnology Conf. (MNC2011)
개최지
Kyoto, Japan