상세 보기
Study of Silicon Oxynitride Thin Films by Plasma-enhanced Atomic Layer Deposition using a Tetraisocyanatesilane (TICS) and N2 plasma
- 제목
- Study of Silicon Oxynitride Thin Films by Plasma-enhanced Atomic Layer Deposition using a Tetraisocyanatesilane (TICS) and N2 plasma
- 저자
- 박진성
- 발행일
- 2022-11-14
- 학회명
- KISM 2022