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"Characteristics of HfN deposited by using Remote Plasma Enhanced Atomic Layer Deposition Method"

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"Characteristics of HfN deposited by using Remote Plasma Enhanced Atomic Layer Deposition Method"
저자
전형탁
발행일
2005-11-02
학회명
AVS 52nd International Symposium & Exhibition
개최지
Hynes Convention Center, Boston, MA.

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