상세 보기
- 제목
- The Rheological Behavior of Colloidal Silica Slurry and Its Influence on Wafer Polishing Process
- 저자
- 박재근
- 발행일
- 2004-04-19
- 학회명
- 106th Annual Meeting & Exposition of the American Ceramic Society
- 개최지
- Indiana Convention Center & RCA Dome, Indianapolis, Indiana, USA