ScholarWorks@한양대학교

상세 보기

The Impact of Grain Size and Composition on the Mechanical Properties of EUV Pellicle

제목
The Impact of Grain Size and Composition on the Mechanical Properties of EUV Pellicle
저자
안진호
발행일
2024-07-03
학회명
NANO KOREA 2024
개최지
일산 KINTEX

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.