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Comparision of Pt Etching Characteristics with SF6 and Cl2 plasma chemistries
- 제목
- Comparision of Pt Etching Characteristics with SF6 and Cl2 plasma chemistries
- 저자
- 안진호
- 발행일
- 2001-10-31
- 학회명
- 2001 international Microprocesses and Nanotechnology Conference