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Atomic Layer Chemical Vapor Deposition of TiN Thin Film on Si(100) and Si(111)

  • 김영도
제목
Atomic Layer Chemical Vapor Deposition of TiN Thin Film on Si(100) and Si(111)
저자
김영도
발행일
2000-04-24
학회명
MRS Symposium
개최지
San Francisco

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