상세 보기
Improvement of thin-film transistor performance in atomic layer deposited SnO film by thermal annealing process
- 제목
- Improvement of thin-film transistor performance in atomic layer deposited SnO film by thermal annealing process
- 저자
- 박진성
- 발행일
- 2020-06-30
- 학회명
- ALD 2020