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Design and modeling of a microwave plasma enhanced chemical vapor deposition system
- 제목
- Design and modeling of a microwave plasma enhanced chemical vapor deposition system
- 저자
- Ming-Chieh Lin
- 발행일
- 2018-06-25
- 학회명
- The 45th IEEE International Conference on Plasma Science (ICOPS 2018)
- 개최지
- Denver, CO, USA