Shrinkage and expansion mechanisms of SiO2 elliptical membrane nanopores

  • Shin, Jae Won
  • Lee, Jeong Yong
  • Oh, Do Hyun
  • Kim, Tae Whan
  • Cho, Woon Jo
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초록

20 nm SiO2 elliptical membrane nanopores with various thicknesses were directly formed in situ by using a focused electron beam with transmission electron microscopy (TEM). The shrinkage and the expansion behaviors of the SiO2 ellipse nanopores with different thicknesses were attributed to variations in their geometries, in particular their curvatures. The geometric mechanisms of elliptical nanopores with various thicknesses fabricated utilizing a SiO2 membrane with a thickness gradient by using an electron beam irradiation are described on the basis of TEM images, which depend on the electron beam irradiation time.

키워드

electron beam effectsgeometrynanoporous materialsnanotechnologyshrinkagesilicon compoundstransmission electron microscopyDNA TRANSLOCATIONDISCRIMINATIONMOLECULESFABRICATIONTRANSPORT
제목
Shrinkage and expansion mechanisms of SiO2 elliptical membrane nanopores
저자
Shin, Jae WonLee, Jeong YongOh, Do HyunKim, Tae WhanCho, Woon Jo
DOI
10.1063/1.3027062
발행일
2008-12
유형
Article
저널명
Applied Physics Letters
93
22
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1 ~ 3