Effects of amorphous InGaZnO thin film transistors with various buffer layers on polyimide substrate under negative bias-temperature stresses

  • Ok, Kyung-Chul
  • Park, Sang-Hee Ko
  • Hwang, Chi-Sun
  • Shin, Hyun Soo
  • Kim, Daehwan
  • ... Park, Jin-Seong
  • 외 2명
Citations

SCOPUS

1

초록

Buffer layers on flexible substrates have strongly affected to electrical performance and instability in oxide TFTs. The oxide TFT on proper buffer layer/PI substrate showed better electrical performance than that on other buffer layers because the buffer layer with high gas diffusion barrier properties can suppress to generate defect states in semiconductor and/or interface from hydrogen and water penetration. The origins of flexible oxide TFT instabilities were systematically investigated by using in-situ/ex-situ measurement and chemical/physical analysis.

키워드

Buffer layersDevice InstabilityFlexible deviceOxide semiconductor thin film transistorBuffer layersInterface statesInterfaces (materials)SubstratesThin film transistorsBias-temperature stressDevice instabilitiesElectrical performanceFlexible deviceFlexible substrateOxide semiconductor thin film transistorsPolyimide substrateWater penetrationOptical waveguides
제목
Effects of amorphous InGaZnO thin film transistors with various buffer layers on polyimide substrate under negative bias-temperature stresses
저자
Ok, Kyung-ChulPark, Sang-Hee KoHwang, Chi-SunShin, Hyun SooKim, DaehwanBae, JongukChin, Byung DooPark, Jin-Seong
DOI
10.1002/j.2168-0159.2013.tb06453.x
발행일
2013-06
유형
Article
저널명
Digest of Technical Papers - SID International Symposium
44
1
페이지
1229 ~ 1231