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Reduction of Large Particles and Light Point Defects (LPD) by Aging and Selective Sedimentation Process in Ceria Slurry for STI-CMP
- 제목
- Reduction of Large Particles and Light Point Defects (LPD) by Aging and Selective Sedimentation Process in Ceria Slurry for STI-CMP
- 저자
- 백운규
- 발행일
- 2006-05-19
- 학회명
- 2006년 춘계 한국재료학회
- 개최지
- 경상대학교