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Study of ac magnetically enhanced capacitively coupled plasma argon discharges using particle-in-cell simulations
- 제목
- Study of ac magnetically enhanced capacitively coupled plasma argon discharges using particle-in-cell simulations
- 저자
- Ming-Chieh Lin
- 발행일
- 2022-10-06
- 학회명
- 75th Annual Gaseous Electronics Conference
- 개최지
- Sendai, Japan