Low-frequency noise characteristics of indium-gallium-zinc oxide ferroelectric thin-film transistors with metal-ferroelectric-metal-insulator-semiconductor structure

초록

We investigate the low-frequency noise characteristics of indium-gallium-zinc oxide ferroelectric thin-film transistors (FeTFTs) with a metal-ferroelectric-metal-insulator-semiconductor (MFMIS) structure. MFMIS FeTFTs are fabricated with different metal-to-FE area ratios (AM/AF's). It is revealed that the noise generation mechanism differs depending on the operation region [low and high drain current (ID) regions] and AM/AF. Excess noise in the low ID region is observed in the MFMIS FeTFTs with AM/AF's of 4 and 6 due to carrier mobility fluctuations. In the high ID region, the carrier number fluctuation generates the 1/f noise of the devices regardless of the AM/AF.

키워드