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Analysis of 6H-SiC Surface under Various Chemical Etching Conditions by Using AFM
- 제목
- Analysis of 6H-SiC Surface under Various Chemical Etching Conditions by Using AFM
- 저자
- 김용균
- 발행일
- 2007-10-27
- 학회명
- Nuclear Science Symposium and Medical Imaging Conference
- 개최지
- HILTON Hawaiian Village Beach Resort, Honolulu, Hawaii, USA