Analysis of 6H-SiC Surface under Various Chemical Etching Conditions by Using AFM

제목
Analysis of 6H-SiC Surface under Various Chemical Etching Conditions by Using AFM
저자
김용균
발행일
2007-10-27
학회명
Nuclear Science Symposium and Medical Imaging Conference
개최지
HILTON Hawaiian Village Beach Resort, Honolulu, Hawaii, USA