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Photoluminescence characteristics of TiO2 film deposited on vertically oriented Si nanowire by remote plasma atomic layer deposition

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Photoluminescence characteristics of TiO2 film deposited on vertically oriented Si nanowire by remote plasma atomic layer deposition
저자
전형탁
발행일
2011-10-30
학회명
AVS 58th International Symposium & Exhibition
개최지
Nashville convention center

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