Improving Specific Contact Resistivity of amorphous IGZO Thin-Film Transistors through ALD-AZO IL and Optimal Annealing Temperature

제목
Improving Specific Contact Resistivity of amorphous IGZO Thin-Film Transistors through ALD-AZO IL and Optimal Annealing Temperature
저자
정재경
발행일
2024-03-28
학회명
ITC 2024
개최지
KAIST, Korea